Lam tcp 9400
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Lam tcp 9400
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TīmeklisHERCULES® Evaluation Lam TCP 9400 PTX Problems and Points of Interest complex and costly wet clean procedure + conditioning no dedicated tools (nitride, poly, … TīmeklisLAM Alliance TCP 9400 DSiE PROCESS MODULES (PM) / CHAMBERS (PM) LAM Alliance TCP 9600 DSiE PROCESS MODULES (PM) / CHAMBERS (PM) LAM Alliance TCP 9400 DFM PROCESS MODULES (PM) / CHAMBERS (PM) LAM Alliance TCP 9600 DFM PROCESS MODULES (PM) / CHAMBERS (PM) LAM Alliance TCP 9400 …
Tīmeklis• Tool: Lam TCP 9400 PTX • Process: Si trench based on HBr and Cl chemistry • Multi-step recipe including break-through and main etch • Main focus in this study: – Main … TīmeklisLam TCP 9400 Our On Sale Equipment in stock Category: Resell Products Tags: Lam Research, Plasma Etch ICP RIE DRIE Bosch Process Description Description The Lam TCP 9400 is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!
http://www.semistarcorp.com/product/lam-tcp9400-se-40086/
TīmeklisLam Research TCP 9400 Poly Etcher ... The LAM 9400 etcher is a high-density, plasma system used for etching polysilicon, silicon, and germanium films. It can also be used for etching silicon nitride. This system is plumbed with chlorine, BCl3, C2F6 and …
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